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3N₄ in chemical-mechanical polishing via Taguchi technique">

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Article Title

Process parameters optimisation for Si₃N₄ in chemical-mechanical polishing via Taguchi technique

Authors

Lin-Lin Wan; Zhao-Hui Deng; Chao-Deng Wang; Wei Liu; Zhi-Jian Liu

Journal

International Journal of Nanomanufacturing (IJNM), 2016 Vol.12 No.2, pp.143 - 153

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