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Study on a non-contact polishing method using motion coupling confined etchant layer technique
Yongzhi Cao; Yuchao Jia; Yongda Yan; Lianhuan Han; Xuesen Zhao; Zhenjiang Hu; Dongping Zhan
International Journal of Nanomanufacturing (IJNM), 2018 Vol.14 No.1, pp.51 - 64
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