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Z-axis tuning fork gyroscope having a controlled anti-phase and freestanding architecture: design and fabrication
Minh Ngoc Nguyen; Long Quang Nguyen; Nhat Sinh Ha; Hoang Manh Chu; Hung Ngoc Vu; Trinh Duc Chu
International Journal of Nanotechnology (IJNT), 2018 Vol.15 No.1/2/3, pp.14 - 23
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