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Process characterisation of deep reactive ion etching for microfluidic application
Chien Mau Dang; Ngan Nguyen Le; Khanh Kim Huynh; Hue Cam Thi Phan; Dung My Thi Dang; Eric Fribourg-Blanc
International Journal of Nanotechnology (IJNT), 2018 Vol.15 No.1/2/3, pp.145 - 156
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