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Etching characteristics of a silicon surface induced by focused ion beam irradiation
Noritaka Kawasegi, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwamu Ashida, Jun Taniguchi, Iwao Miyamoto, Sadao Momota
International Journal of Manufacturing Technology and Management (IJMTM), 2006 Vol.9 No.1/2, pp.34 - 50
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