Characteristics of rotating arc for CF₄ removal
by Kwan-Tae Kim, Young-Hoon Song, Min Suk Cha, Dae Hoon Lee, Dong-Hyun Kim
International Journal of Environment and Waste Management (IJEWM), Vol. 2, No. 4/5, 2008

Abstract: Characteristics of CF₄ treatment process with a rotating arc are investigated under different thermal and non-thermal plasma conditions. To generate high temperature or non-thermal plasma conditions, a rotating arc reactor is operated with various operating conditions, which are species of carrier gases, flow rates, and input power. Test results reveal that that high temperature conditions caused by CH₄ and O₂ addition is an effective approach for increasing CF₄ removal efficiency. Non-thermal plasma conditions, however, do not result in noticeable increase in CF₄ removal efficiencies despite supplying O₂ or Ar gases into the process.

Online publication date: Thu, 04-Dec-2008

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Environment and Waste Management (IJEWM):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com