Measurement of thermal boundary resistance in ∼10 nm contact using UHV-SThM
by Jaehee Park; Seunghoe Koo; Kyeongtae Kim
International Journal of Nanotechnology (IJNT), Vol. 16, No. 4/5, 2019

Abstract: Thermal boundary resistance (TBR), which contributes significantly to the determination of thermal networks and heat dissipation at nanoscale, has been studied using various experimental methods, including 3ω method, X-ray deflection, time-domain thermoreflectance (TDTR), and theoretical methods such as diffuse mismatch model (DMM), acoustic mismatch model (AMM) and molecule dynamics (MD). However, the size effect of TBR measurement at the nanoscale has not been done well due to the limitations of general measurement methods. In this study, we propose TBR measurement using ultra-high vacuum scanning thermal microscopy (UHV-SThM), which can investigate the size effect of TBR through heat transfer with nanoscale contacts. The TBRs of Au-Al₂O₃ (metal/non-metal) and SiO₂-Al₂O₃ (non-metal/non-metal) contacts were measured. The TBR of Au-Al₂O₃ (metal/non-metal) was measured to be ∼1.3 times larger than that of SiO₂-Al₂O₃ (non-metal/non-metal). This result is analysed by the classical heat transfer model and two temperature model (TTM) including DMM and the electron direct heat transfer. Classical analysis was shown to be contrary to the experimental results, but TTM shows the same trend as the experiment. In particular, the larger experimental results than the TTM are analysed by the size effect of the energy carriers. The TBR measurement method using UHV-SThM is expected to be used actively in study of nanoscale TBR measurement and the size effect of energy carriers.

Online publication date: Mon, 13-Jan-2020

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanotechnology (IJNT):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com